TiC/TiN/TiCN/a-Al2O3/k-Al2O3 Coatings CVD Furnace with 700-1050°C Temperature Control
Brand Name:Ruideer
Model Number:630，530，430
Minimum Order Quantity:1 set
Delivery Time:4-5monthes
Payment Terms:L/C, T/T
Place of Origin:China
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Location:
Zhuzhou Hunan China
Address:
No.755, Xianyuehuan Rd, Tianyuan District, Zhuzhou, Hunan Province
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Product Details
TiC/TiN/TiCN/a-Al2O3/k-Al2O3 coatings chemical vapor deposition CVD furnace
1. Main technical parameters
1. Power supply voltage: 380V 50HZ;
2. Maximum temperature: 1100°C;
3. Working temperature: 900-1050°C;
4. Total power: about 75KW;
5. Heating power: about 55KW;
6. Number of reaction chambers: 2
7. Effective size of reaction chamber: φ500 (inner diameter)
mm×1500 (effective
height) mm;
8. Occupation size (l×w×h) : 8100×7000×5100mm;
9. Equipment weight: about 10T
2. Assembly Group
The CVD coating furnace consists of six parts: workbench, reaction
chamber, heating cover, cooling cover, rail crane, condenser.
3. Equipment Strengths
3.1. Small floor space and reasonable layout.
3.2. High degree of automation.
3.3.Supporting auxiliary equipment such as tail gas neutralization device, titanium tetrachloride filling device, gas busbar, etc., can be provided.
3.4. Process control system is conducive to independent R&D of new processes.
4.CVD graphit boat
Various types of graphite boats can be provided.
5.CVD reaction chamber
The CVD reaction chambers are centrifugally cast with high -temperature alloy,which can greatly reduce deformation adn increase the life time to 200 furnaces.
TiC/TiN/TiCN/a-Al2O3/k-Al2O3 Coatings CVD Furnace with 700-1050°C Temperature Control
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