Honeycomb Ceramic CVD Coating Furnace for 700-1050C Process Temperature and Optional Off Gas Neutralizer

Brand Name:Ruideer
Certification:CE
Model Number:336/4412/5518
Minimum Order Quantity:1 set
Delivery Time:5-6 months
Payment Terms:L/C, T/T
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Location: Zhuzhou Hunan China
Address: No.755, Xianyuehuan Rd, Tianyuan District, Zhuzhou, Hunan Province
Supplier`s last login times: within 1 hours
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Product Details

Honeycomb ceramic CVD coating furnace

CVD furnaces used for the chemical vapor deposition (CVD) process. Chemical vapor deposition is a process in which a thin film is deposited on a substrate using a chemical reaction between vaporized precursor gases and a heated surface.

Characteristics of a CVD coating process

  • Applied at elevated temperature to facilitate reaction.
  • Typically applied under vacuum.
  • Contaminants must be removed from the part surface before coating application.
  • Process may limit the base materials that can be coated.I.e. temperature limitations or reactivity limitations.
  • Process may limit the ability to mask specific target areas.
  • Unlike most PVD(physical vapor depositio processes ,the CVD Process is not limited to line-of-site application. Coating gas will coat all areas of a part including threads, blind holes, and interior surface.
  • Film thickness is limited due to coating stress.
  • Coating is bonded to the surface during the reaction which creates a superior adhesion when compared to typical PVD or low temperature applied spray coatings.
EquipmentmodelCVD430-1250CVD430-1600CVD530-1250CVD530-1600CVD630-1250CVD630-1600
Effective space(mm)Φ400X1250Φ400X1600Φ500X1250Φ500X1600Φ600X1200Φ600X1600
Heating power(KW)394845556580
Quantity of heating zone454545
Equipment footprint(mm)6000*5800*48006000*5800*51006500*6000*48006500*6000*51007200*6200*48007200*6200*5100
Process temperature(℃)700-1050
Precursors and process gasesTiCL4,AICL3,CH3CN,H2,N2,Ar,CH,CO,CO2,HCI,H2S
Types of coatingTiC,TiN,TiCN,a-AL2O3,K-AI2O3
Optional equipments

1. Off gas neutralizer (incl.evacuating device);

2. Second stage gas distributor (incl.,pipeline);

3. Gas station (incl.pipeline)


• Design standards


The equipment is designed in accordance with the pressure vessel requirements of the Quality and Technical Supervision Bureau, and is qualified after pressure testing and shipped. The electrical design and construction meet national standards.


• Installation pre-test and pre-acceptance


The equipment is fully assembled in our factory, including all pipelines, vacuum pipelines, process gas pipelines, cooling water pipelines, compressed air pipelines, etc. Pre-testing can be carried out after installation. At the customer site, pipelines other than the equipment are provided by the customer. The installation also includes the connection of all cables. At the customer site, the main cable connecting the power cabinet is provided by the customer. After installation, we conduct vacuum and positive pressure leakage tests on the entire equipment, as well as mechanical and electrical function tests.


• Disassembly and transportation


The equipment will be disassembled in several large parts, packed in a standardized manner, and loaded into the transport vehicle.


• Customer site installation and commissioning


The Redel after-sales engineer will lead the team to complete commissioning, product trial burning and other work within 20 working days. The customer needs to make appropriate preparations and provide the necessary tools, such as hoisting and lifting equipment. And provide installation personnel support (it is recommended to have 1 mechanical personnel and 1 electrical personnel).


• Final acceptance

After installation and commissioning, the equipment can be finally accepted in accordance with the requirements of the technical contract.


• Training

Our after-sales engineers will provide a systematic and complete on-site training, including operation, maintenance, troubleshooting, etc.


• Technical data delivery


To ensure safe operation and equipment maintenance, the following technical data will be provided to customers:


1. Equipment installation layout

2. User manual

3. Spare parts list

4. Electrical drawings

5.  Component manual


FAQ

Are you a factory or trading company?

Q: Are you a factory or trading company?

A:We are China leading high-temperature vacuum furnace manufacturer with over 10 years’ experience.

Do you have customization or OEM service?

Q: Do you have customization or OEM service??

A:Yes,we have powerful R&D team and high-tech equipment.So we can not only supply the regular model,but also the customizable furnace as the repuirment of our clients.

What's your advantage?

Q:What's your advantage?

A:

l Quick response to your enquiry

l High quality control

l Stable supply chain

l Timely delivery

l Excellent after-sales service


China Honeycomb Ceramic CVD Coating Furnace for 700-1050C Process Temperature and Optional Off Gas Neutralizer supplier

Honeycomb Ceramic CVD Coating Furnace for 700-1050C Process Temperature and Optional Off Gas Neutralizer

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