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4H N type Semi type SiC Wafer 6inch(0001)Double Side Polished Ra≤1 nm Customization
Silicon Carbide (SiC) wafers and substrates are specialized materials used in semiconductor technology made from silicon carbide, a compound known for its high thermal conductivity, excellent mechanical strength, and wide bandgap. Exceptionally hard and lightweight, SiC wafers and substrates provide a robust foundation for fabricating high-power, high-frequency electronic devices, such as power electronics and radio frequency components.
1. High-Voltage Endurance: SiC wafer has over 10 times the
breakdown field strength compared to Si material. This allows for
higher breakdown voltages to be achieved through lower resistivity
and thinner drift layers. For the same voltage endurance, the
on-state resistance/size of SiC wafer power modules is only 1/10th
of Si, leading to significantly reduced power losses.
2. High-Frequency Endurance: SiC wafer does not exhibit the tail
current phenomenon, enhancing the switching speed of devices. It is
3-10 times faster in switching speed compared to silicon (Si),
making it suitable for higher frequencies and faster switching
speeds.
3. High-Temperature Endurance: The bandgap width of SiC wafer(~3.2
eV) is three times that of Si, resulting in stronger conductivity.
The thermal conductivity is 4-5 times that of silicon, and the
electron saturation speed is 2-3 times that of Si, enabling a
10-fold increase in operating frequency. With a high melting point
(2830°C, approximately twice that of Si at 1410°C), SiC wafer
devices significantly improve operational temperature while
reducing current leaks.
Form of 4H N-type Semi-type SiC Wafer:
Grade | Zero MPD Grade | Production Grade | Research Grade | Dummy Grade | |
Diameter | 150.0 mm +/- 0.2 mm | ||||
Thickness | 500 um +/- 25 um for 4H-SI | ||||
Wafer Orientation | On axis: <0001> +/- 0.5 deg for 4H-SI | ||||
Micropipe Density (MPD) | 1 cm-2 | 5 cm-2 | 15 cm-2 | 30 cm-2 | |
Electrical Resistivity | 4H-N | 0.015~0.025 | |||
4H-SI | >1E5 | (90%) >1E5 | |||
Doping Concentration | N-type: ~ 1E18/cm3 | ||||
Primary Flat (N type) | {10-10} +/- 5.0 deg | ||||
Primary Flat Length (N type) | 47.5 mm +/- 2.0 mm | ||||
Notch (Semi-Insulating type) | Notch | ||||
Edge exclusion | 3 mm | ||||
TTV /Bow /Warp | 15um /40um /60um | ||||
Surface Roughness | Polish Ra 1 nm | ||||
CMP Ra 0.5 nm on the Si face | |||||
Cracks by high intensity light | None | None | 1 allowed, 2 mm | Cumulative length 10 mm, single length 2 mm | |
Hex Plates by high intensity light* | Cumulative area 0.05 % | Cumulative area 0.05 % | Cumulative area 0.05 % | Cumulative area 0.1 % | |
Polytype Areas by high intensity light* | None | None | Cumulative area 2% | Cumulative area 5% | |
Scratches by high intensity light** | 3 scratches to 1 x wafer diameter cumulative length | 3 scratches to 1 x wafer diameter cumulative length | 5 scratches to 1 x wafer diameter cumulative length | 5 scratches to 1 x wafer diameter cumulative length | |
Edge chip | None | None | 3 allowed, 0.5 mm each | 5 allowed, 1 mm each | |
Contamination by high intensity light | None |
Physical Photo of 4H N-type Semi-type SiC Wafer:
Application of 4H N-type Semi-type SiC Wafer:
• GaN epitaxy device
• Optoelectronic device
• High frequency device
• High power device
• High temperature device
• Light emitting diodes
Application Picture of 4H N-type Semi-type SiC Wafer:
Our product customization services allow you to tailor the Silicon Carbide Wafer to your specific needs. We can adjust the Silicon Carbide layer to meet your conductivity requirements and provide a Carbide Silicon Wafer that meets your exact specifications. Contact us today to learn more about our product customization services.
Q:What size are SiC wafers?
A:Our standard wafer diameters range from 25.4 mm (1 inch) to 300
mm (11.8 inches) in size; wafers can be produced in various
thicknesses and orientations with polished or unpolished sides and
can include dopants
Q:Why are SiC wafers expensive?
A:The sublimation process to produce SiC requires significant
energy to reach 2,200˚C, while the final usable boule is no more
than 25 mm in length, and growth times are very long
Q:How to make a SiC wafer?A:The process involves converting raw
materials such as silica sand into pure silicon. The growth of
silicon crystals using the Czochralski process, the slicing of the
crystals into thin, flat discs, and the cleaning and preparation of
the wafers for use in semiconductors devices.
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