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839-800327-315 839800327315 LAM Clean Copper Kit Etch
Brand/Manufacturer | LAM/USA |
Part Number | 839-800327-315 |
Alternate Part Number | 839-800327-315 |
Description | Clean Copper Kit Etch |
Dimennsions | 9.0 cm x 9.0 cm x 3.3 cm |
Weight | 0.46kg |
Product Details
Etch technology is required in all integrated circuit (IC) production to help shape a chip’s intricate features. For microelectromechanical systems (MEMS) manufacturing processes, it is used to carve out the widely varying features that form physical structures such as large cavities and high aspect ratio (HAR) deep trenches.
Lam’s DSiE product family delivers exceptional process control at high productivity for several critical and non-critical deep silicon etch applications, including MEMS, power devices, passive components, sensors, and transducers.
High etch rates and productivity with flexibility to use both Bosch
and steady-state processes
Tunable depth uniformity delivered through gas flow ratio and
transformer coupled capacitive tuning capabilities
Advanced control for improved symmetry and tilt minimization
Tunable CD enabled through fast gas switching
LAM News
LAM RESEARCH CORPORATION ANNOUNCES PARTICIPATION AT UPCOMING CONFERENCE
A live webcast of the presentation will be available to the public and can be accessed from the Investors’ section of Lam’s website at www.lamresearch.com. A replay of the webcast will be available for two weeks after the presentation date.
About Lam Research:
Lam Research Corporation is a global supplier of innovative wafer
fabrication equipment and services to the semiconductor industry.
As a trusted, collaborative partner to the world’s leading
semiconductor companies, we combine superior systems engineering
capability, technology leadership, and unwavering commitment to
customer success to accelerate innovation through enhanced device
performance. In fact, today, nearly every advanced chip is built
with Lam technology. Lam Research (Nasdaq: LRCX) is a FORTUNE 500®
company headquartered in Fremont, Calif., with operations around
the globe.
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