PVD Coating Tantalum Sputtering Target For Semiconductor Coating And Optical Coating

Brand Name:PRM
Certification:ISO9001
Model Number:Custom
Minimum Order Quantity:1pc
Delivery Time:5~7days
Payment Terms:T/T
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Location: Baoji Shaanxi China
Address: No.188 Gaoxin Road,Weibin District Baoji City,Shaanxi,China
Supplier`s last login times: within 35 hours
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Product Details

Product Information:


NamePVD coating tantalum target
GradeTa1 Ta2 RO5200 RO5400 RO5252 RO5255
Purity≥99.95%
Density16.68g/cm3
SurfaceMachined surface, no pits, scratches, stains, burrs and other defects
StandardASTM B708
ShapeFlat target, Rotating target ,Special-shaped customization


Chemical Content of PVD Coating Tantalum Target:


GradeMain elements Impurity content less than %
 TaNbFeSiNiWMoTiNbOCHN
Ta1Remain——0.0050.0050.0020.010.010.0020.040.020.010.00150.01
Ta2Remain——0.030.020.0050.040.030.0050.10.030.010.00150.01
TaNb3Remain<3.50.030.030.0050.040.030.005——0.030.010.00150.01
TaNb20Remain17.0~23.00.030.030.0050.040.030.005——0.030.010.00150.01
Ta2.5WRemain 0.0050.0050.00230.010.0020.040.020.010.00150.01
Ta10WRemain 0.0050.0050.002110.010.0020.040.020.010.00150.01

Feature of PVD Tantalum Target:


High melting point,
Low steam pressure,
Good cold working performance,
High chemical stability,
Strong resistance to liquid metal corrosion,
The surface oxide film has a large dielectric constant


Application:


The tantalum target and the copper back target are welded, and then semiconductor or optical sputtering is performed, and the tantalum atoms are deposited on the substrate material in the form of oxides to achieve sputtering coating; tantalum targets are mainly used in semiconductor coating, optical coating and other industries . In the semiconductor industry, metal (Ta) is currently mainly used to coat and form a barrier layer through physical vapor deposition (PVD) as a target material.


We can process according to customer's drawing, and produce Ta rod,plate,wire,foil,crucible etc.




Please send us an inquiry for more information


China PVD Coating Tantalum Sputtering Target For Semiconductor Coating And Optical Coating supplier

PVD Coating Tantalum Sputtering Target For Semiconductor Coating And Optical Coating

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