Door Locking Mode Vacuum Deposition Furnace For Graphite And Semiconductor Devices

The Vacuum deposition furnace is used for the preparation of carbon-carbon composite materials, and the deposition furnace is mainly used for the preparation of pyrolytic carbon coating on the surface of graphite, semiconductor devices and heat-resistant scour materials.

Scope of application:

Graphite, semiconductor devices, heat-resistant scour materials.

1. Basic Parameters:

1) Design temperature: 1250℃/1650℃/1800℃/2200℃

2) Common temperature: 900~1200℃

3) Vacuum degree: < 50Pa

4) Pressure rise rate: 6.67pA /h(or 150Pa/24h) in cold state of empty furnace

5) Heating mode: graphite resistance heating or induction heating, independent temperature control, good temperature uniformity

6) Atmosphere medium: vacuum /CH4/C3H6/H2/N2/Ar

7) Gas control mode: mass flow meter control, multi-channel gas path, uniform flow field, no deposition dead Angle, good deposition effect;

Multi-stage and efficient exhaust treatment system, environmentally friendly, easy to clean up;

8) Furnace type: square, round, vertical or horizontal structure (non-standard design), fully enclosed deposition chamber, good sealing effect, strong anti-pollution ability;

9) Furnace cooling mode: furnace shell water cooling, external circulation quick cooling system can be selected, short cooling time, high production efficiency;

2. Structure of vacuum deposition furnace:

Structure form: horizontal - side discharge, vertical - up/down discharge

Furnace door locking mode: manual/automatic

Furnace shell material: inner stainless steel/all stainless steel

Insulation material: carbon felt/graphite felt/carbon fiber cured felt

Heater, muffle material: graphite /CFC

Infrared instrument: single colorimetric/double colorimetric

Power supply: KGPS/IGBT(only suitable for medium frequency heating)

Produce Specification:

Hunan Jingtan Automation Equipment Co., Ltd. was founded in 2021, the production base Zhuzhou Guangjichang Technology Co., Ltd. was founded in 2014, is a high-tech enterprise integrating research and development, production, sales and service, and has become a famous leading manufacturer of thermal equipment in China.Now it has two factories,which covers 3500m2. The main products are vacuum sintering furnace, silicon carbide sintering furnace, high temperature graphitization furnace, vapor deposition furnace, high temperature carbon tube furnace, vacuum carbonization furnace, vacuum hot press furnace, vacuum induction melting furnace, etc. The equipment produced by our company is widely used in aerospace, electronics, transportation, machinery, metallurgy, cemented carbide, refractory metal, special ceramics, carbon carbon composite materials, semiconductor materials and solar cells and other dozens of processing and manufacturing industries and fields, and has won the trust and praise of the majority of users with high-quality products and perfect service.

We have always adhered to the science and technology enterprise, continuous innovation, pay attention to cooperation with scientific research institutions and major universities, and develop a number of high-tech thermal equipment with the industry's leading level. Our company can design and manufacture non-standard thermal equipment according to user requirements, and provide customers with corresponding process technical support, so as to relieve all worries for users.

The company has a number of utility model patent certification, and has ISO9001:2015 quality management certificate, can provide CE, UL and other product certificates for the equipment. In order to continuously meet customer needs, to provide "directional application, focus on development, Customized per customer’s requirements" efficient characteristic services. Our company has a number of domestic first cases, such as: chlorine gas sintering furnace (can make the product purity of 99.9999%), ultra-high temperature graphitization furnace temperature up to 3200 degrees, vacuum hot press furnace weight up to 800 tons.

"Customer first, the pursuit of quality, continuous innovation, continue to lead!" It is the service purpose of Jingtan company;" Based in Zhuzhou, radiating China, facing the world "is our company's service concept. At present, our products are mainly exported to Europe, Middle East, Southeast Asia and other countries; in the domestic market has also won the praise of the majority of users, has been highly recognized by the industry. Hunan Jingtan Automation Equipment Co., Ltd. strives to become your most trusted manufacturer of high temperature equipment.