Product Description:
- Wafer cassette has become an indispensable tool in the
semiconductor industry due to its superior protective performance,
anti-static characteristics, and good compatibility.
- A wafer cassette is a device specifically designed for storing and
transporting semiconductor wafers, widely used in semiconductor
manufacturing, testing, and packaging processes.
Features:
As semiconductor fabrication technology has advanced to produce
more sophisticated devices, wafer cassette design has kept pace.
Semiconductor fabrication now involves higher automation levels,
greater tool uptime and throughput, higher process temperatures,
additional mask layers, and compound semiconductor materials. In
response, wafer carriers have been designed to have better thermal
capabilities, protection from electrostatic discharge, reduced
outgassing at high temperatures, and improved dimensional stability
and particulation.
Wafer cassettes are designed to suit a wide variety of applications
and may possess the following qualities:
- Capability to hold from one to multiple wafers, commonly up to 25
for transport or storage.
- Open side wall configuration to allow easy access for wafer
handling.
- Locating track notches at the center of the cassette, as well as
pins and holes on the top rail for reliable operation with
automated material handling systems and process tools.
- End wall configurations having a handle or flanges for material
handling systems.
Material | Degree of temperature resistance | Property | Application |
PFA Cassette | 200~220℃ | Strong acid, strong hydrofluoric acid, strong base resistant | For acid& base process |
PP Cassette | 40~60℃ | Pros: Light weight, able to welding Cons: Distort easily |
For general transfer process
|
PC Cassette | 80~100℃ | Light weight, able to welding |
PEI Cassette | 130~150℃ | Wear resistant, anti-static |
Why Choose US:
- High quality materials: Our products are made of high-quality, chemically resistant
materials to ensure effective protection of wafers during
transportation and storage, extending their service life.
- User-friendly design: Ergonomic design makes operation more convenient, reduces operator
fatigue, and improves work efficiency.
- Excellent sealing performance: Adopting an efficient sealing design to prevent external
pollution, ensure a clean internal environment, and protect the
wafer from being affected.
- High quality materials: Our products are made of high-quality, chemically resistant
materials to ensure effective protection of wafers during
transportation and storage, extending their service life.