Product Details
Ultra high purity tungsten alloy W-Ti sputtering target Plate
Planar Billet for Semiconductor Physical Vapor Deposition
Tungsten-titanium (WTi) films are known to act as the effective diffusion barrier between
Al and Si in semiconductor and photovoltaic cells industry. WTifilms are typically deposited as thin films by physical vapor
deposition (PVD) through sputtering of a WTialloy target. It is desirable to produce a target that will provide
film uniformity,minimum particle generation during sputtering, and desired
electrical properties. In order to meet the reliability
requirements for diffusion barriers of complex integrated circuits,
the WTialloy target must have high purity and high density.
Type | W (wt.%) | Ti (wt.%) | Purity (wt.%) | Relative Density (%) | Grain Size (µm) | Dimension (mm) | Ra (µm) |
WTi-10 | 90 | 10 | 99.9-99.995 | ≥99 | ≤20 | ≤Ø452 | ≤1.6 |
WTi-20 | 80 | 20 | 99.9-99.99 | ≥99 | ≤20 | ≤Ø452 | ≤1.6 |
WTi | 70-90 | 10-30 | 99.9-99.995 | ≥99 | ≤20 | ≤Ø452 | ≤1.6 |
Company Profile
Luoyang Forged Tungsten-Molybdenum Material Co., Ltd. is
concentrated on the R&D, manufacture, and sales of rare
refractory metals for more than 16 years. We specially produce the
deep processing produts of tungsten, molybdnum, titanium, tantalum,
niobium and alloy products upon the advantage of geography and
resource. Our team has rich production experience, favorable
production environment, advanced production equipment and high-tech
testing equipment, so we could stabilize the quality of the
products. The products are widely used in the industry of power,
electron, sapphire, solar cell, glass fibre, vacuum medical
instrument, metallurgy and aerospace, etc. Our products export to
Europe, USA, Japan, Korea, India, etc, and win the customers’
praise. We insist on “honest and quality as the root”, and service
our customers!
Corporate Idea:
Innovation: Accept new things, and have the courage of technical
innovation and thinking innovation
Excellent Quality: Quality is the life of the company, and keep
improving.
Sincerity Service: Try our best and honest, think about what
customers think about, worry about what customers worry about.
Win-win Development: Create good development together with our
customers.