W-Ti Metal Sputtering Targets Planar Billet For Semiconductor Physical Vapor Depot

Brand Name:FGD
Certification:ISO9001, ISO14000
Model Number:fgd t-002
Minimum Order Quantity:50KG
Delivery Time:3-5 days
Payment Terms:L/C, T/T, Western Union, MoneyGram
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Location: Luoyang Henan China
Address: No. 102, Building 33, Phase II of Zhongde Industrial Park, Yibin District, Luoyang City, Henan Province
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Ultra high purity tungsten alloy W-Ti sputtering target Plate Planar Billet for Semiconductor Physical Vapor Deposition

Tungsten-titanium (WTi) films are known to act as the effective diffusion barrier between Al and Si in semiconductor and photovoltaic cells industry. WTifilms are typically deposited as thin films by physical vapor deposition (PVD) through sputtering of a WTialloy target. It is desirable to produce a target that will provide film uniformity,minimum particle generation during sputtering, and desired electrical properties. In order to meet the reliability requirements for diffusion barriers of complex integrated circuits, the WTialloy target must have high purity and high density.


Type

W

(wt.%)

Ti

(wt.%)

Purity

(wt.%)

Relative Density

(%)

Grain Size (µm)Dimension (mm)

Ra

(µm)

WTi-10901099.9-99.995≥99≤20≤Ø452≤1.6
WTi-20802099.9-99.99≥99≤20≤Ø452≤1.6
WTi70-9010-3099.9-99.995≥99≤20≤Ø452

≤1.6

China W-Ti Metal Sputtering Targets Planar Billet For Semiconductor Physical Vapor Depot supplier

W-Ti Metal Sputtering Targets Planar Billet For Semiconductor Physical Vapor Depot

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