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As a precision ceramic parts manufacturer, we produce and sales multi types ceramic products for Semiconductor as our customer requirements.
Our ultra-flat ceramic vacuum wafer chucks improve yield management for semiconductor wafer processing. Low-surface-contact configurations minimize risk of back-side particles negatively affecting wafer geometry for precision applications.
Properties | Units | 95 Alumina | 99 Alumina | Zirconia |
Density | g / cm3 | 3.65 | 3.92 | 5.95 - 6.0 |
Water Absorption | % | 0 | 0 | 0 |
Coefficient of Thermal Expansion | 10-6 / K | 7.9 | 8.5 | 10.5 |
Modulus of Elasticity Young’s Mod | Gpa | 280 | 340 | 210 |
Poisson’s Ratio | / | 0.21 | 0.22 | 0.3 |
HV Hardness | Mpa | 1400 | 1650 | 1300 - 1365 |
Flexural Strength @ Room Temperature | Mpa | 280 | 310 | 950 |
Flexural Strength @ 700℃ | Mpa | 220 | 230 | 210 |
Compressive Strength@Room Temperature | Mpa | 2000 | 2200 | 2000 |
Fracture Toughness | Mpa * m½ | 3.8 | 4.2 | 10 |
Heat Conductivity @ Room Temperature | W / m * k | 18 - 25 | 26 - 30 | 2.0 - 2.2 |
Electrical Resistivity @ Room Temperature | Ω*mm2 / m | >1015 | >1016 | >1015 |
Max Application Temperature | ℃ | 1500 | 1750 | 1050 |
Resistance to Acid Alkaline | / | High | High | High |
Dielectric Constant | / | 9.5 | 9.8 | 26 |
Dielectric Strength | KV / mm | 16 | 22 | / |
Thermal Shock Resistance | Δ T ( ℃ ) | 220 | 180 - 200 | 282 - 350 |
Tensile Strength @ 25℃ | Mpa | 200 | 248 | 252 |
Company Introuduce
Wuxi Special Ceramic Electrical Co.,Ltd mainly produces alumina, Silicon nitride, Zirconia, Steatite, Boron nitride,
Cordierite,mullite products, widely used in metal welding, electronic conductor, mechanics,
assembling, insulation, chemicals, instrument, textile, nuclear
industry, aerial field.We accept trial produce according to the
drawing or sample.It usually takes 15 days to finish trial
product.Mass produce usually takes 30 days.Goods' package is carton
or PLT.It can be negotiable with each other.
We mainly sell goods to toshiba lighting group in Japan and
Europe.Our aim is to deliver goods with high quality at quick
delivery date.