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Pipeline heater
Benefits
Many semiconductor device manufacturing processes are performed
under a vacuum environment. While modern semiconductor
manufacturing processes use more reactive precursors to lower the
reaction temperature, reduce the thermal budget, and achieve high
quality films, byproduct generation has created serious issues for
process management. The recent adoption of atomic layer deposition
has made the effluent management even more challenging due to
unreacted precursors that are sent to vacuum foreline directly.
This leads to significant problems such as shortened pump life,
valve malfunction, pressure gauge drift, poor system control, and
high particles; these in turn reduce tool productivity due to
frequent tool preventive maintenance and low process yield.
We provide technical consulting services on semiconductor
manufaturing processes. Specifically, we focus on helping the
customer:
- Identify the source of problematic processes
- Optimize vacuum systems to ensure efficient system performance
- Design solutions for optimal effluent management
- Develop critical components to address effluent-related
complications
Specifications
Power Source: Electric
Voltage: 12-220V
Power : ≤ 2W/cm2
Material: silicone rubber with etching film
Accessories optional
Vacuum foreline heater or gasline heater always co-works with temperature controllers. We provide many choices to make accurate heating control and troubleshooting.