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Aluminum Titanium Alloy Target
Aluminum Titanium Alloy Target is a metal material with high die-casting yield, high density, high strength and good flexibility. The difference between aluminum-titanium alloy and titanium-aluminum alloy lies in the ratio of these two elements. Aluminum-titanium alloy usually contains 0.50 to 1.20% by weight of magnesium, 1.80 to 2.30% by weight of manganese, 0.05 to 0.15% by weight of titanium, and iron and copper in impurities, accounting for less than 1.00% of the total weight of iron, copper and zinc, The rest is aluminum. The aluminum-titanium sputtering target can be made of aluminum-titanium alloy. The aluminum-titanium sputtering target has high feed speed, excellent cutting performance and impressive metal removal rate. The aluminum-titanium coating can protect your tools from wear and tear, thereby extending their service life. Aluminum-titanium sputtering targets can also be used for decorative coatings on electronic devices (such as mobile phones, spectacle frames or the dials of luxury watches).
Aluminum-titanium alloy target material is cost-effective
The aluminum-titanium target combines the advantages of the
aluminum target and the titanium target. As we all know, titanium
and titanium alloys have excellent properties in various
industries, but the problem is that their prices are too high. In
aluminum-titanium alloys, the content of titanium is only 0.05% to
0.15%, so its price is cheaper than pure titanium and titanium
alloys.
Aluminum Titanium Alloy Target Picture:
Aluminum Titanium Alloy Target is an alloy sputtering target
material for vacuum coating, in which the content of titanium and
aluminum can be adjusted to obtain titanium aluminum alloy targets
with different characteristics.
Titanium-aluminum intermetallic compound is a hard and brittle
material with good wear resistance. A layer of titanium-aluminum
intermetallic compound is coated on the surface of ordinary tools,
which can effectively prolong the use time of the tool. For
example, sputtering is carried out with nitrogen discharge arc
starting. A surface film with high hardness and low friction
coefficient can be obtained, which is particularly suitable for
surface coating of various tools, molds and other vulnerable parts,
so it has a good application prospect in the machining industry.
The preparation of titanium aluminum alloy targets is difficult.
According to Titanium-aluminum alloy phase diagram, titanium and
aluminum can form a variety of intermetallic compounds, resulting
in processing brittleness of titanium-aluminum alloy, especially
when the aluminum content of the alloy exceeds 50% (atomic ratio),
the oxidation resistance of the alloy is suddenly reduced , The
oxidation is serious. At the same time, the exothermic expansion
during the alloying process is very easy to produce bubbles,
shrinkage holes and shrinkage, resulting in high porosity of the
alloy, which cannot meet the requirements of target density.
1. Sputtering target Sputtering target refers to a sputtering source that is sputtered and deposited on a substrate to form various functional thin films by magnetron sputtering, multi-arc ion plating or other types of coating equipment under appropriate process conditions. Shooting targets are widely used in many fields such as decoration, tooling, glass, electronic devices, semiconductors, magnetic recording, flat display, solar cells, etc. The target materials required in different fields are different. According to the production method, the sputtering target materials can be divided into Powder target, smelting target and spraying target; according to the shape, it can be divided into flat target and tubular target. The flat target can be divided into rectangular target and arc target; according to the composition can be divided into pure metal target, alloy target, There are many varieties of oxide targets, silicide targets and so on.
2. The principle of sputtering coating is to bombard the solid
surface with accelerated ions, and the ions and the solid surface
atoms exchange momentum, so that the atoms on the solid surface
leave the solid and deposit on the surface of the substrate. This
process is the sputtering coating. Figure 1 shows the sputtering
coating process. Schematic diagram. The film deposited by
sputtering with a target has high density and good adhesion to the
substrate. Therefore, sputtering deposition has become a widely
used film preparation technology. Titanium aluminum alloy
sputtering target preparation technology Sputtering alloy target
The material needs to meet the requirements of purity, density,
grain size, surface finish and other requirements. Among them,
purity, density and grain size are directly related to the
preparation process of the target. The preparation of metal alloys
usually adopts the ordinary smelting method. However, the
preparation of titanium and aluminum alloys This method is not
suitable for the following reasons:
(1) The smelting process of titanium aluminum alloy is easy to form
a variety of intermetallic compounds, such as Ti3A1, TiAl, TiAl2,
TiAl3, etc. The existence of these intermetallic compounds leads to
the processing brittleness of titanium aluminum alloy, especially
when the aluminum content in the alloy exceeds 50% (Atomic ratio),
the problem is particularly obvious;
(2) The smelting process is used to prepare titanium-aluminum alloy
targets, and bubbles, porosity and segregation are prone to occur
during the casting process, resulting in uneven composition and
structure in the alloy, resulting in unstable target quality.
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